JPH0321002Y2 - - Google Patents
Info
- Publication number
- JPH0321002Y2 JPH0321002Y2 JP18408184U JP18408184U JPH0321002Y2 JP H0321002 Y2 JPH0321002 Y2 JP H0321002Y2 JP 18408184 U JP18408184 U JP 18408184U JP 18408184 U JP18408184 U JP 18408184U JP H0321002 Y2 JPH0321002 Y2 JP H0321002Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- amplifier
- current
- electrons
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 9
- 230000003321 amplification Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 238000003199 nucleic acid amplification method Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18408184U JPH0321002Y2 (en]) | 1984-12-04 | 1984-12-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18408184U JPH0321002Y2 (en]) | 1984-12-04 | 1984-12-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6199356U JPS6199356U (en]) | 1986-06-25 |
JPH0321002Y2 true JPH0321002Y2 (en]) | 1991-05-08 |
Family
ID=30741569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18408184U Expired JPH0321002Y2 (en]) | 1984-12-04 | 1984-12-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0321002Y2 (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4424950B2 (ja) * | 2003-09-10 | 2010-03-03 | 浜松ホトニクス株式会社 | 電子線検出装置及び電子管 |
-
1984
- 1984-12-04 JP JP18408184U patent/JPH0321002Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6199356U (en]) | 1986-06-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102866413B (zh) | 用于在带电粒子设备中使用的检测器 | |
EP0259907A1 (en) | Electron detection with energy discrimination | |
JP3170680B2 (ja) | 電界磁気レンズ装置及び荷電粒子線装置 | |
GB2071403A (en) | Secondary electron detector system for scanning electron microscope | |
JP3431228B2 (ja) | 荷電粒子検出装置及び荷電粒子照射装置 | |
EP0397229B1 (en) | X-ray measurement apparatus | |
CA1048163A (en) | Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons | |
JPH0321002Y2 (en]) | ||
Grubb | The calibration of beam measurement devices in various electron microscopes, using an efficient Faraday cup | |
CN116635750A (zh) | 单体式检测器 | |
EP3547665A1 (en) | Photon detector | |
Chase et al. | Amplifiers for use with pn junction radiation detectors | |
Russell et al. | Microchannel plate detector for low voltage scanning electron microscopes | |
JPS61233958A (ja) | イオン検出器 | |
EP1162645A3 (en) | Specimen inspection instrument | |
Gabus et al. | A Portable Phototube Unit Using an RCA 954 Tube | |
Brewe et al. | Silicon photodiode detector for a glancing‐emergence‐angle EXAFS technique | |
Dyukov | Wireless Preamplifier for the Specimen Current Mode Detector in a SEM | |
US3025404A (en) | Radiation detector probes | |
JPS6233246Y2 (en]) | ||
JP3345256B2 (ja) | 荷電粒子検出装置 | |
JPS6328078A (ja) | 記憶光伝導体画像センサ | |
JPH0580101B2 (en]) | ||
SU1275586A1 (ru) | Растровый электронный микроскоп | |
Parker | Solar cells as backscattered-electron detectors |